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Multiple scale modeling of PVD sputter processes

: Turowski, M.; Jupé, M.; Melzig, T.; Pflug, A.; Demircan, A.; Ristau, D.


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings 2016 : 19-24 June 2016, Tucson, Arizona, United States
Washington, DC: OSA, 2016 (OSA Technical digest series)
ISBN: 978-1-943580-13-2
Paper WB.4
Conference" Optical Interference Coatings" (OIC) <2016, Tucson/Ariz.>
Fraunhofer IST ()

A multiple scale model named virtual coater is applied to investigate in the layer properties of growing films in dependence of PVD process conditions. Results for density, roughness, stress, and index of refraction are presented.