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Scatter reduction of calcium fluoride based DUV optics

: Wang, J.; Cangemi, M.J.; Oudard, J.F.; Trost, M.; Herffurth, T.; Schröder, S.; Duparre, A.


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings 2016 : 19-24 June 2016, Tucson, Arizona, United States
Washington, DC: OSA, 2016 (OSA Technical digest series)
ISBN: 978-1-943580-13-2
Paper WE.6
Conference" Optical Interference Coatings" (OIC) <2016, Tucson/Ariz.>
Fraunhofer IOF ()

Angle resolved scatter measurement was performed on uncoated and AR coated CaF2. Subsurface-damage-free CaF2 and AR coatings with smoothed capping led to 4-fold and 2-fold scatter reduction when compared to the corresponding super polished CaF2.