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A novel optoelectronic instrument for on-line precise measurements

: Woithuis, A.; Büsing, K.; Bource, L.; Dalessi, G.


Langenbeck, P. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
In-process optical metrology for precision machining
Bellingham/Wash.: SPIE, 1987 (Proceedings of SPIE 802)
ISBN: 0-89252-837-0
4 S.
International Symposium on Optical and Optoelectronic Applied Science and Engineering <4, 1987, The Hague>
Fraunhofer IPT ()
head; spectral resolution; optoelectronic; sensor; glass; semiconductor laser; electronic

A novel highly precise distance measurement tool is introduced. Using an optical autofocussing head and a backlash free mechanical translation mechanism, it is possible to reach a resolving power of 0.1 micron and an absolute accuracy of better than 1 micron in combination with a measurement range of 40 millimeters. Due to the character of the autofocus it is also possible to recognize on-line the inclination and curvature of the surface.