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High temperature micro forming of inorganic glass - an effective replication method

Hochtemperatur Mikroumformung von anorganischem Glas - eine effektive Replikationsmethode
: Schubert, A.; Edelmann, J.; Burkhardt, T.

Volltext urn:nbn:de:0011-n-487064 (372 KByte PDF)
MD5 Fingerprint: e492da3d17f60aa9e980e827f594e4bd
Erstellt am: 7.4.2011

Zervos, H. ; European Society for Precision Engineering and Nanotechnology -EUSPEN-:
6th International Conference of the European Society for Precision Engineering and Nanotechnology 2006. Proceedings : May 28th - June 1st, 2006, Baden bei Wien, Vienna
Bedford: Euspen, 2006
ISBN: 0-9553082-0-8
ISBN: 978-0-9553082-0-8
S.144-147 (Vol.2)
European Society for Precision Engineering and Nanotechnology (International Conference) <6, 2006, Baden bei Wien>
European Society for Precision Engineering and Nanotechnology (Annual General Meeting) <8, 2006, Baden bei Wien>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IWU ()
microforming; hot embossing; replication; micromoulding; glass pressing; borosilicate glass; Pyrex; borofloat; microshape; Mikroumformung; Heißprägen; Replikation; Blankpressen; Borsilikatglas

With the technology of the high-temperature micro-forming it is possible to mold functional structures of the micro system technology directly into inorganic glasses. After improving the equipment technology of hot embossing with respect to achievable forming temperatures, isothermal tempering and accurate controlling of the load transmission, the possibility to micro-structure glass wafers of Pyrex®774 could be proven within a suitable process window.
Concerning the form filling of the structures a further optimization of the process parameters is necessary. The sharpness of edges of the molded structures permits the conclusion that highest accuracies can be achieved comparable to optical quality. For this purpose, however, also the molding tools must achieve optical quality regarding surface roughness. Also an improvement of the coating is necessary, in order to minimize the wear of the tools. The experiments nevertheless show the high potential of the technology.