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Micro structuring of borosilicate glass by high-temperature micro-forming

: Schubert, A.; Edelmann, J.; Burkhardt, T.

Preprint urn:nbn:de:0011-n-486938 (469 KByte PDF)
MD5 Fingerprint: f13edeace74610e4f9ae7c86f3c70a34
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Erstellt am: 8.4.2011

Microsystem Technologies 12 (2006), Nr.8, S.790-795
ISSN: 0946-7076
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IWU ()
Pyrex glass; Hot-Embossing; microsystem technology; glass structuring; precision glass pressing; microfluidic; micro optic

A new process technology is presented which allows the direct micro structuring of various glasses, especially bondable borosilicate glass (e.g. Pyrex 7740), by means of forming at high temperatures with a microstructured tool. The technology and fabrication equipment are described on the basis of a molded demonstration structure, and possibilities for application and transfer to industrial manufacturing are shown.