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Piezoresistive co-efficient of diamond-like carbon films
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2005
Conference Paper
Titel
Piezoresistive co-efficient of diamond-like carbon films
Author(s)
Tibrewala, A.
Peiner, E.
Bandorf, R.
Biehl, S.
Lüthje, H.
Hauptwerk
16th MicroMechanics Europe Workshop, MME 2005. Proceedings
Konferenz
MicroMechanics Europe Workshop (MME)
Workshop on Micromachining, Micromechanics and Microsystems 2005
Language
English
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST