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2005
Conference Paper
Titel
Optical microstructures on non-planar surfaces
Abstract
Realization of optical microstructures on non-planar surfaces is a new branch of lithographic fabrication techniques. We introduce a novel laser lithography system specially developed for realization of micro-optical profiles on curved surfaces. The system makes the high quality and reliable process technology of laser-lithography available for a complete new class of micro-optical elements. An overview of the technology and first example structures are presented.