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A high precision MEMS based capacitive accelerometer for seismic measurements

: Utz, Alexander; Walk, Christian; Stanitzki, Alexander; Mokhtari, Mir; Kraft, Michael; Kokozinski, Rainer


Institute of Electrical and Electronics Engineers -IEEE-:
IEEE Sensors 2017. Conference Proceedings : October 29 - November 1, 2017, Glasgow, Scotland, UK
Piscataway, NJ: IEEE, 2017
ISBN: 978-1-5090-1012-7
ISBN: 978-1-5090-1013-4
ISBN: 978-1-5386-4056-2
Sensors Conference <2017, Glasgow>
Fraunhofer IMS ()
capacitive sensing; low noise; accelerometer; MEMS

In this paper, we present a capacitive, MEMS based accelerometer comprising an ultra-low noise CMOS integrated readout-IC and a high precision bulk micro machined sensing element. The resulting accelerometer reaches an acceleration equivalent noise of only 200 ng/fHz, which makes it suitable for seismic measurement that require noise levels significantly below 1 pgAjHz. The design of the sensing element and readout-IC are presented in detail and measurement results are shown which demonstrate the performance of the sensor system.