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  4. Electrostactically in-plane driven silicon micropump for modular configuration
 
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2017
Conference Paper
Title

Electrostactically in-plane driven silicon micropump for modular configuration

Abstract
We present an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators capable of deflecting beyond the electrode gap distance. The so called ""Nano Electrostatic Drive"" (NED) actuator was introduced by us in 2015 for out-of-plane actuation. The device presented utilizes an in-plane actuation solution. Depending on the requirements of the targeted system, the micropump can be modularly designed to meet the specified differential pressures and flow rates by a serial arrangement of the actuators and parallel arranging pump-base units respectively.
Author(s)
Uhlig, Sebastian  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Gaudet, Matthieu
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Langa, Sergiu  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Schimmanz, Klaus
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Conrad, Holger
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Kaiser, Bert  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Schenk, Harald  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Mainwork
3rd Conference on MicroFluidic Handling Systems, MFHS 2017. Conference Proceedings  
Conference
Conference on MicroFluidic Handling Systems (MFHS) 2017  
Link
Link
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
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