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Electrostactically in-plane driven silicon micropump for modular configuration

: Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Schimmanz, Klaus; Conrad, Holger; Kaiser, Bert; Schenk, Harald

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Lötters, J. ; University of Twente, Enschede:
3rd Conference on MicroFluidic Handling Systems, MFHS 2017. Conference Proceedings : 4-6 October 2017, Enschede, The Netherlands
Enschede, 2017
Conference on MicroFluidic Handling Systems (MFHS) <3, 2017, Enschede>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IPMS ()

We present an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators capable of deflecting beyond the electrode gap distance. The so called “Nano Electrostatic Drive” (NED) actuator was introduced by us in 2015 for out-of-plane actuation. The device presented utilizes an in-plane actuation solution. Depending on the requirements of the targeted system, the micropump can be modularly designed to meet the specified differential pressures and flow rates by a serial arrangement of the actuators and parallel arranging pump-base units respectively.