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Measuring position and figure deviation of freeform mirrors with computer generated holograms

: Beier, M.; Stumpf, D.; Zeitner, U.D.; Gebhardt, A.; Hartung, J.; Risse, S.; Eberhardt, R.; Gross, H.; Tünnermann, A.


Optical Society of America -OSA-, Washington/D.C.:
Freeform optics : Part of Imaging and applied optics 2015; 7 - 11 June 2015, Arlington, Virginia, United States
Washington, DC: OSA, 2015
ISBN: 978-1-943580-00-2
Paper FT3B.2
Conference "Imaging and Applied Optics" <2015, Arlington/Va.>
Conference Freeform Optics <2015, Arlington/Va.>
Fraunhofer IOF ()

A novel interferometric metrology using a multi-zone computer generated hologram for determining position and figure deviations of two anamorphic aspherical mirrors arranged on a common substrate is presented.