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Electrostatic bending actuators with a liquid filled nanometer scale gap

: Gaudet, Matthieu; Uhlig, Sebastian; Stolz, Michael; Arscott, Steve; Conrad, Holger; Langa, Sergiu; Kaiser, Bert; Schenk, Harald


Meng, Ellis (Ed.) ; Institute of Electrical and Electronics Engineers -IEEE-:
MEMS 2017, 30th IEEE International Conference on Micro Electro Mechanical Systems : Las Vegas, Nevada, USA, January 22-26 2017
Piscataway, NJ: IEEE, 2017
ISBN: 978-1-5090-5078-9
ISBN: 978-1-5090-5079-6
International Conference on Micro Electro Mechanical Systems (MEMS) <30, 2017, Las Vegas/Nev.>
Fraunhofer IPMS ()

We report a considerable improvement in the electrostatic actuation of silicon-based nano electrostatic drive (NED) structures [1] via the insertion of a liquid into the nanosystem. The dielectric liquid provides an insulating, high dielectric constant deformable medium in the electrode gaps that enhances the generated force per unit-applied volt performance. The study demonstrates that small volumes of liquids (microfluidics/nanofluidics) can be inserted into micro and nanoelectromechanical systems (MEMS/NEMS) to enhance systems' performances up to 2.75.