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A 10 bit very low-power CMOS SAR-ADC for capacitive micro-mechanical pressure measurement in implants

: Bechen, B.; Weiler, D.; Boom, T. van den; Hosticka, B.J.

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Advances in radio science 4 (2006), S.243-246
ISSN: 1684-9965
Kleinheubacher Tagung <2005, Miltenberg>
Konferenzbeitrag, Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IMS ()
SAR analog/digital converter; ADC; low power; component matching; INL; DNL; SNDR; pressure measurement; capacitive sensor; medical implant; comparator noise; Umsetzer; Druckmessung; Implantat; Rauschen; kapazitiver Sensor

This paper presents the development of a 10 bit very low-power CMOS SAR-ADC to be used in medical implants. The first part discusses the principle schematic and the requirements for component matching and the comparator of the ADC. Additionally, the measurement results of a fabricated test chip will be given. The second part of this paper discusses the possibility of direct on-chip implementation of a capacitive pressure sensor in a switched-capacitor SAR-ADC.