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Automating wafer-level test of uncooled infrared detectors using wafer-prober

 
: Makhlouf, Mohamed; Goller, Diana; Gendrisch, Lutz; Kolnsberg, Stephan; Vogt, Franz; Utz, Alexander; Weiler, Dirk; Vogt, Holger

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Institute of Electrical and Electronics Engineers -IEEE-; Institute of Electrical and Electronics Engineers -IEEE-, Council on Electronic Design Automation:
IEEE 23rd International Symposium on On-Line Testing and Robust System Design, IOLTS 2017 : 3 - 5 July 2017, Hotel Makedonia Palace, Thessaloniki, Greece
Piscataway, NJ: IEEE, 2017
ISBN: 978-1-5386-0351-2
ISBN: 978-1-5386-0352-9
ISBN: 978-1-5386-0353-6
S.13-16
International Symposium on On-Line Testing and Robust System Design (IOLTS) <23, 2017, Thessaloniki>
Englisch
Konferenzbeitrag
Fraunhofer IMS ()
wafer-level MEMS testing; infrared detectors; automatic lid-chips testing

Abstract
Fraunhofer IMS develops and fabricates far-infrared focal plane arrays (IRFPA) using microbolometers with a pixel pitch of 17μm technology realized on top of a 0.35 μm CMOS readout integrated circuit (ROIC). The microbolometers are encapsulated by a Chip-Scale-Package (CSP) to ensure a high quality vacuum level. The CSP is realized by placing an infrared transparent lid above a solder frame surrounding the microbolometer array. To concept a wafer-level test it is very challenging to implement highly accurate electrical stimuli and a far infrared radiation source (black body) while affecting the wafer-prober handling by a non-flat wafer surface, due to the infrared transparent lids of the CSP. Accordingly, wafer-level test has been developed based on a PC which controls, by using a test program, the wafer handling of a prober, the electrical stimuliof a test hardware, and the far-infrared radiation such as the optical stimuli. Thus, the most important electro-optical parameters of IRFPAs will be measured at wafer-level: Noise Equivalent Temperature Difference (NETD), responsivity, and the percentage of the defective pixels.

: http://publica.fraunhofer.de/dokumente/N-467704.html