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Surface characterization of high-end optical components using light scattering

: Schröder, S.; Trost, M.; Herffurth, T.; Hauptvogel, M.; Sachkov, M.E.; Zhupanov, V.G.


Optical Society of America -OSA-, Washington/D.C.:
Optical Fabrication and Testing : Part of Optical Design and Fabrication; 9-13 July 2017, Denver, Colorado, United States
Washington, DC: OSA, 2017
ISBN: 978-1-943580-31-6
Paper OW3B.6
Conference "Optical Fabrication and Testing" (OF&T) <2017, Denver/Colo.>
Optical Design and Fabrication Congress <2017, Denver/Colo.>
Fraunhofer IOF ()

Light scattering is a powerful tool to assess the quality and the performance of high-end optical surfaces. In addition to laboratory tools, a compact scatter sensor has been developed to enable even large freeform surfaces to be analyzed.