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  4. Encapsulation of optical gratings using nanoporous alumina layers
 
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2016
Journal Article
Title

Encapsulation of optical gratings using nanoporous alumina layers

Abstract
In this work, we describe a method to encapsulate optical gratings with nanoporous Al2O3. The encapsulation process consists of covering a grating, filled with a sacrificial material, by an organic-inorganic thin alucone layer. The element is than heated up to 400 °C to remove the organic component from the alucone film. The nanoporous Al2O3 film, formed after the removal of the organic component acts as a diffusion layer for the decomposition products of the sacrificial material. The complete removal of the sacrificial material was confirmed by energy dispersive x-ray spectroscopy (EDX).
Author(s)
Ghazaryan, Lilit  
Kley, Ernst-Bernhard  
Szeghalmi, Adriana  
Journal
Asian journal of physics  
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
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