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Digital holography: Evolution from a research topic to a versatile tool for the inline 100% 3D quality control in industry

: Fratz, Markus; Beckmann, Tobias; Schiller, Annelie; Seyler, Tobias; Bertz, Alexander; Carl, Daniel; Buse, Karsten

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AMA Service GmbH, Wunstorf:
AMA Conferences 2017. Proceedings : Nuremberg Exhibition Centre, Germany, 30.5.-1.6.2017; Proceedings; SENSOR 2017, 18th International Conference on Sensors and Measurement Technology, IRS² 2017, 15th International Conference on Infrared Sensors & Systems; CD-ROM
Wunstorf: AMA Service, 2017
ISBN: 978-3-9816876-4-4
International Conference on Sensors and Measurement Technology (SENSOR) <18, 2017, Nuremberg>
International Conference on Infrared Sensors & Systems (IRS2) <15, 2017, Nuremberg>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IPM ()
digital holography; inline inspection; Phase Retrieval; parallel computing; GPU

Digital multiwavelength holography is a technique for precise 3D height measurements of optically rough surfaces. We demonstrate measurements on a milled surface, using four wavelengths between 514 and 532 nm, and achieve precision in the submicrometer range. Height structures of <400 nm can be resolved up to an unambiguous height of 370 μm and with a lateral resolution of 7 μm. Acquisition times of < 400 ms, including the time needed for parallel processing of the data, make our sensor a versatile tool for high-throughput 100% inspection in manufacturing environments.