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Innovative stationary and in-line sputter technologies for precision optical coatings
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2005
Conference Paper
Titel
Innovative stationary and in-line sputter technologies for precision optical coatings
Author(s)
Frach, P.
Bartzsch, H.
Liebig, J.
Hauptwerk
Selected Papers Revised from the Proceedings of the Eighth International Symposium on Sputtering and Plasma Processes, ISSP 2005
Konferenz
International Symposium on Sputtering and Plasma Processes (ISSP) 2005
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP