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Interface morphology of Mo/Si multilayer systems with varying Mo layer thickness studied by EUV diffuse scattering

: Haase, Anton; Soltwitsch, Victor; Braun, Stefan; Laubis, Christian; Scholze, Frank

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Optics Express 25 (2017), Nr.13, S.15441-15455
ISSN: 1094-4087
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IWS ()
mirror; Monte Carlo method

We investigate the influence of the Mo-layer thickness on the EUV reflectance of Mo/Si mirrors with a set of unpolished and interface-polished Mo/Si/C multilayer mirrors. The Mo-layer thickness is varied in the range from 1.7 nm to 3.05 nm. We use a novel combination of specular and di-use intensity measurements to determine the interface roughness throughout the multilayer stack and do not rely on scanning probe measurements at the surface only. The combination of EUV and X-ray reflectivity measurements and near-normal incidence EUV di-use scattering allows to reconstruct the Mo layer thicknesses and to determine the interface roughness power spectral density. The data analysis is conducted by applying a matrix method for the specular reflection and the distorted-wave Born approximation for di-use scattering. We introduce the Markov-chain Monte Carlo method into the field in order to determine the respective confidence intervals for all reconstructed parameters. We unambiguously detect a threshold thickness for Mo in both sample sets where the specular reflectance goes through a local minimum correlated with a distinct increase in di-use scatter. We attribute that to the known appearance of an amorphous-To-crystallization transition at a certain thickness threshold which is altered in our sample system by the polishing.