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Comparison of nano particle implantation with picosecond lasers by concerning different wavelengths from aluminum and copper on silicon wafer substrate

 
: Azhdast, M.H.; Kossatz, M.; Eichler, H.J.; Lang, K.-D.; Glaw, V.

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Optical Society of America -OSA-, Washington/D.C.:
CLEO: Applications and Technology : Part of CLEO: 2017; 14-19 May 2017, San Jose, California, United States
Washington, DC: OSA, 2017
ISBN: 978-1-943580-27-9
Paper ATu4C.2
Conference on Lasers and Electro-Optics - Applications and Technology (CLEO A&T) <2017, San Jose/Calif.>
Englisch
Konferenzbeitrag
Fraunhofer IZM ()

Abstract
Copper and Aluminum have similar reactions in Infra-red lasers for nano particle printing and different behavior in frequency doubled lasers. Absorption of two different metals shows various roughness of thin film on silicon wafer substrates.

: http://publica.fraunhofer.de/dokumente/N-456020.html