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Global flatness of spatial light modulators
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2006
Conference Paper
Titel
Global flatness of spatial light modulators
Author(s)
Wagner, M.
Künzelmann, U.
Schenk, H.
Lakner, H.
Hauptwerk
MOEMS display, imaging, and miniaturized microsystems IV
Konferenz
Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" 2006
DOI
10.1117/12.644580
Language
English
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Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Tags
MOEMS
micromirror
surface profile
global flatness
packaging