Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Global flatness of spatial light modulators
| Ürey, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS display, imaging, and miniaturized microsystems IV : 25 - 26 January 2006, San Jose, California, USA
Bellingham/Wash.: SPIE, 2006 (SPIE Proceedings Series 6114)
ISBN: 0-8194-6156-3
Paper 611404 |
| Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" <4, 2006, San Jose/Calif.> |
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| Englisch |
| Konferenzbeitrag |
| Fraunhofer IPMS () |
| MOEMS; micromirror; surface profile; global flatness; packaging |