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Scanning 2D micromirror with enhanced flatness at high frequency

 
: Wolter, A.; Klose, T.; Hsu, S.; Schenk, H.; Lakner, H.

:

Ürey, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS display, imaging, and miniaturized microsystems IV : 25 - 26 January 2006, San Jose, California, USA
Bellingham/Wash.: SPIE, 2006 (SPIE Proceedings Series 6114)
ISBN: 0-8194-6156-3
Paper 61140L
Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" <4, 2006, San Jose/Calif.>
Englisch
Konferenzbeitrag
Fraunhofer IPMS ()
micro scanning mirror; laser scanning; micromirror; laser beam deflection; MEMS; MOEMS; optical MEMS; retina scanning display; laser projection

: http://publica.fraunhofer.de/dokumente/N-45447.html