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Ultrathin carbon-fluorine film processing
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2005
Conference Paper
Titel
Ultrathin carbon-fluorine film processing
Author(s)
Barz, J.
Haupt, Michael
Vohrer, Uwe
Hilgers, H.
Oehr, C.
Hauptwerk
Plasma surface engineering, PSE 2004
Konferenz
International Conference on Plasma Surface Engineering (PSE) 2004
DOI
10.1016/j.surfcoat.2005.02.064
Language
English
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Fraunhofer-Institut für Grenzflächen- und Bioverfahrenstechnik IGB