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Wavefront-based alignment: Properties and precision

 
: Krappig, Reik; Schmitt, Robert

Laser + photonics 12 (2017), Nr.1, S.40-43
ISSN: 1865-5475
Englisch
Zeitschriftenaufsatz
Fraunhofer IPT ()
Montage; optische Messtechnik; Prozessoptimierung

Abstract
Wavefront-based alignment is an elegant approach to high-precision positioning of functional surfaces and elements in multi-component optical systems. The system status can be evaluated in one single measuring operation and suitable correction actions can be derived in multiple degrees of freedom.

: http://publica.fraunhofer.de/dokumente/N-452500.html