Options
Title
MOBILER HALTER FUER EINEN WAFER
Date Issued
2003
Author(s)
Landesberger, C.
Bleier, M.
Klumpp, A.
Patent No
2000-10038052
Abstract
WO 200211184 A UPAB: 20020621 NOVELTY - Mobile holder has a base element (1) of a semiconductor or ceramic material, provided with a fixing device (3,4,5), having a functional layer (5) and an electrode structure (3,4) applied to an insulation layer (2), used for electrostatically attaching the semiconductor wafer to the base element and a second fixing device for attaching the mobile holder to a carrier, provided with a conductor for contacting the electrode structure of the first fixing device. USE - The mobile holder is used for handling a semiconductor wafer, e.g. for chip card manufacture. ADVANTAGE - The electrostatic retention of the semiconductor wafer prevents physical damage to the latter.
Language
de
Patenprio
DE 2000-10038052 A: 20000802