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MOBILER HALTER FUER EINEN WAFER

Mobile holder for semiconductor wafer has fixing device used for electrostatically securing semiconductor wafer.
 
: Landesberger, C.; Bleier, M.; Klumpp, A.

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Frontpage ()

DE 2000-10038052 A: 20000802
EP 2001-960593 A: 20010730
EP 1305821 A1: 20030502
H01L0021
Deutsch
Patent, Elektronische Publikation
Fraunhofer IZM ()

Abstract
WO 200211184 A UPAB: 20020621 NOVELTY - Mobile holder has a base element (1) of a semiconductor or ceramic material, provided with a fixing device (3,4,5), having a functional layer (5) and an electrode structure (3,4) applied to an insulation layer (2), used for electrostatically attaching the semiconductor wafer to the base element and a second fixing device for attaching the mobile holder to a carrier, provided with a conductor for contacting the electrode structure of the first fixing device. USE - The mobile holder is used for handling a semiconductor wafer, e.g. for chip card manufacture. ADVANTAGE - The electrostatic retention of the semiconductor wafer prevents physical damage to the latter.

: http://publica.fraunhofer.de/dokumente/N-44880.html