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2004
Conference Paper
Titel
Imaging defects in thin DLC coatings using high frequency scanning acoustic microscopy
Abstract
In this work high frequency scanning acoustic microscopy was employed to nondestructively characterize subsurface defects in chromium containing DLC (Cr-DLC) coatings. Subsurface defects as small as one micron were successfully detected in a flat Cr-DLC coated steel coupon. Depth of the imaged subsurface defects was estimated using a simple geometrical acoustics model. The nature of the subsurface defects was investigated by using FIB/SEM technique. Curved Cr-DLC coated components including a roller and gear tooth were also imaged, and the encountered challenges were addressed.
Author(s)
Language
English