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Characterization of anodic bondable LTCC for wafer-level packaging

 
: Hu, Xiaodong; Bäuscher, Manuel; MacKowiak, Piotr; Zhang, Yucheng; Hoelck, Ole; Walter, Hans; Ihle, Martin; Ziesche, Steffen; Hansen, Ulli; Maus, Simon; Gyenge, Oliver; Mukhopadhyay, Biswajit; Ehrmann, Oswin; Lang, Klausdieter; Ngo, Haduong

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Institute of Electrical and Electronics Engineers -IEEE-; IEEE Components, Packaging, and Manufacturing Technology Society:
IEEE 18th Electronics Packaging Technology Conference, EPTC 2016. Proceedings : 30. November - 3 December 2016, Singapore
Piscataway, NJ: IEEE, 2016
ISBN: 978-1-5090-4368-2
ISBN: 978-1-5090-4369-9
ISBN: 978-1-5090-4370-5
S.501-505
Electronics Packaging Technology Conference (EPTC) <18, 2016, Singapore>
Englisch
Konferenzbeitrag
Fraunhofer IKTS ()
Fraunhofer IZM ()
ceramic materials; characterization; charge transfer

Abstract
This work helps to clarify the effects on bondable Low Temperature Cofiered Cofired Ceramic(LTCC) material from Fraunhofer IKTS under different bonding conditions as changes in temperature, voltage and time. The Paper investigates silicon bonded to LTCC and silicon with a thin aluminum layer bonded to LTCC and compares both with anodic bonding of standard Borofloat 33® from Schott GmbH to silicon. The result of this work provides a comprehensive overview of bonding parameters for the materials Borofloat 33® and LTCC. An inspection of the bonding quality is carried out, which includes the optical inspection of the bonded area and interface observation via a scanning electron microscope (SEM). The bonding quality is also shown with the charge transfer during the bonding process. This paper can be used to achieve a higher degree of freedom in the design of hermetic wafer level packaging for various Micro-Electro-Mechanical System(MEMS)devices made of glass and ceramic materials.

: http://publica.fraunhofer.de/dokumente/N-442078.html