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Integration of Ni-Cu-Zn and Hexagonal Ferrites into LTCC Modules: Cofiring Strategies and Magnetic Properties

: Töpfer, J.; Hesse, J.; Bierlich, S.; Barth, S.; Capraro, B.; Rabe, T.; Nagib-Zadeh, H.; Bartsch, H.

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Journal of the Japan Society of Powder and Powder Metallurgy 61 (2014), Nr.S1, S.S214-S217
ISSN: 1880-9014 (online)
ISSN: 0532-8799 (print)
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IKTS ()

We have studied the integration of Ni-Cu-Zn ferrite spinels as well as substituted hexagonal Co2Y-and M-type ferrites into LTCC (Low Temperature Ceramic Co-firing) modules. The cofiring behavior and the magnetic properties of these materials were investigated and evaluated for multilayer applications. Ni-Cu-Zn ferrites exhibit permeabilities of μ=300–500 for operating frequencies in the MHz range. Cu-substituted Y-type ferrites Ba2Co2-x-yZnxCuyFe12O22 in combination with sintering additives display sufficient shrinkage and densification at 900°C. A permeability of μ=10 is observed; however, substituted Co2Y-type ferrites do not exhibit long-term stability at 900°C. Co/Ti-substituted M-type ferrites BaFe12-2yCoyTiyO19 (y=1.2) with planar magneto-crystalline anisotropy exhibit excellent soft magnetic behavior. Using sintering additives, complete densification is reached at 900°C and a permeability of μ=15 and a resonance frequency of larger than 1 GHz are observed. Integration of ferrite multilayer inductor components into LTCC modules using free and constrained cofiring technologies is demonstrated.