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Preparation and characterization of multifunctional thin film sensors based on amorphous diamond-like-carbon

: Lüthje, H.; Biehl, S.; Bandorf, R.; Sick, J.-H.; Peiner, E.; Tibrewala, A.

Korean Sensors Society; IEEE Electron Devices Society:
Transducers '05. 13th International Conference on Solid-State Sensors, Actuators and Microsystems. Vol.2 : Seoul, Korea, June 5 - 9, 2005. Digest of technical papers
Piscataway, NJ: IEEE Operations Center, 2005
ISBN: 0-7803-8994-8
International Conference on Solid-State Sensors, Actuators and Microsystems <13, 2005, Seoul>
Fraunhofer IST ()
amorphous carbon; piezoresistivity; load sensor; sensor washer; intelligent bearing

Amorphous carbon thin films also named diamond-like-carbon (DLC) are well known for their hardness, wear resistant and low friction behavior in tribological contacts. This paper deals with an additional aspect of this material, namely piezoresisivity of DLV films, which makes DLC based coatings to novel multifunctional surfaces with superior sensoric properties. DLC was prepared at low temperatures (<150°C) with piezo K-factors of some 100 to 1200. We will show, that this excellent coating can be prepared with optimum properties for force/pressure transducer and tribological coating as well. This allows direct measurements at mechanically treated surfaces.