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Micro force sensor with piezoresistive amorphous carbon strain gauge

 
: Peiner, E.; Tibrewala, A.; Bandorf, R.; Biehl, S.; Lüthje, H.; Doering, L.

:

Korean Sensors Society; IEEE Electron Devices Society:
Transducers '05. 13th International Conference on Solid-State Sensors, Actuators and Microsystems. Vol.1 : Seoul, Korea, June 5 - 9, 2005. Digest of technical papers
Piscataway, NJ: IEEE Operations Center, 2005
ISBN: 0-7803-8994-8
S.551-554
International Conference on Solid-State Sensors, Actuators and Microsystems <13, 2005, Seoul>
Englisch
Konferenzbeitrag
Fraunhofer IST ()
amorphous carbon; piezoresistive gauge factor; bulk silicon micromachining; micro force sensor

Abstract
In this contribution, we report for the first time on a piezoresistive amorphous carbon (a-C) strain gauge successfully integrated into a silicon micro cantilever force sensor. Amorphous carbon was sputter deposited on a silicon membrane and structured by the lift-off technique using photo resist. Cantilevers comprising a-C strain gauges were etched out of this membrane using TMAH and KOH in a bulk silicon micromachining process. Realized prototypes were tested by applying a variable load to the cantilever free end. We found linear characteristics of the strain gauge resistance vs. the applied force in the range of 0 to /spl plusmn/600 /spl mu/N revealing a piezoresistive gauge factor of a-C of nearly 70.

: http://publica.fraunhofer.de/dokumente/N-43868.html