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Ptychographic imaging with a tin plasma based EUV light source

: Bußmann, J.; Odstrcil, M.; Bresenitz, R.; Teramoto, Y.; Juschkin, L.

Volltext ()

TH Aachen -RWTH-; Forschungszentrum Jülich:
JARA FIT Jülich Aachen Research Alliance for Fundamentals of Future Information Technology. Annual Report 2015
Jülich: Forschungszentrum Jülich, 2016
Aufsatz in Buch, Elektronische Publikation
Fraunhofer ILT ()

We present results of lens-less imaging experiments performed using a laser assisted discharge plasma source. The experiments have been performed using tin emission spectrum of extreme ultraviolet (EUV) radiation near 13.5 nm wavelength. Through a scanning diffraction imaging technique, namely ptychography, the reconstruction of a test object has been demonstrated with the resolution down to 100 nm.