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Influence of tipradius and substrate on the nanotribological characterization of thin DLC coatings

: Staedler, T.; Schiffmann, K.I.


Baker, S.P. ; Materials Research Society -MRS-:
Fundamentals of nanoindentation and nanotribology II : Symposium held at the 2000 MRS Fall Meeting, November 28 - 30, 2000, Boston, Massachusetts, U.S.A.
Warrendale, Pa.: MRS, 2001 (MRS Proceedings 649)
ISBN: 1-55899-559-5
Materials Research Society (Fall Meeting) <2000, Boston/Mass.>
Fraunhofer IST ()

In this work diamond-like carbon films deposited via plasma enhanced chemical vapor deposition with a thickness of 250nm on different substrates are characterized by nanoindentation and microscratching in combination with scanning probe microscopy. The substrates (SU8 photoresist, quartz glass, Si(100) and AlTiC ceramic) provide a wide range of combinations between film and substrate properties. The experimental configuration allows the testing of samples with loads between 1μN and 10mN and a high local resolution. The tribological response of the various film/substrate systems is analysed in two different ways. A single scratch test with linear increasing load and an oscillating wear tests at constant loads is used. The tip radii of the conical diamond tips utilized vary between 0.6 and 6μm. Both, the substrates as well as the tip radii, show a significant influence on the tribological behavior of the systems.