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2016
Conference Paper
Titel
Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems
Abstract
In this paper we present a holistic wafer-level manufacturing process for nanoscopic sensor devices based on individualized single-wall carbon nanotubes (SWCNTs) integrated in MEMS. The fabrication technology is demonstrated in detail. Moreover, a first application in form of a MEMS test stage for SWCNT strain and reliability experiments is shown.
Author(s)