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Adhesion mechanism between laser sputtered aluminum nano particles on Si-wafer by Nd:YAG laser

 
: Azhdast, M.H.; Eichler, H.J.; Lang, K.-D.; Glaw, V.

:

Optical Society of America -OSA-, Washington/D.C.:
CLEO: Applications and Technology : Part of CLEO: 2016. 5-10 June 2016, San Jose, California, United States
Washington, DC: OSA, 2016 (OSA Technical digest series)
ISBN: 978-1-943580-11-8
Paper ATh1K.7
Conference on Lasers and Electro-Optics - Applications and Technology (CLEO A&T) <2016, San Jose/Calif.>
Englisch
Konferenzbeitrag
Fraunhofer IZM ()

Abstract
In this research, different laser parameters is investigated using Nd:YAG Picosecond laser to sputter nano particles on Si-Wafer substrate. Furthermore, the influence of various parameters on adhesion tests and mechanism of deposited layer is studied.

: http://publica.fraunhofer.de/dokumente/N-434889.html