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MlLOS: The approach to Micro-Assembly

: Pfeifer, Tilo; Dussler, Gerd; Bitte, Frank

Chiffre, Leonardo de ; European Society for Precision Engineering and Nanotechnology -EUSPEN-:
1st Euspen Topical Conference on Fabrication and Metrology in Nanotechnology 2000. Proceedings : Copenhagen, May 28 - 30, 2000
Lyngby: Technical University of Denmark, Department of Manufacturing Engineering and Management, 2000
Topical Conference on Fabrication and Metrology in Nanotechnology <1, 2000, Kopenhagen>
Fraunhofer IPT ()
Fertigungsmesstechnik; Qualitätsmanagement; Qualitätssicherung; Prozessüberwachung; micro assembly; quality control; process observation

The autornation of rnicro assembly is becoming more anq more important in micro technology, Especially the demands concemjng handling and process observation of hybrid micro systems with optical and mechanical functions are quite high. Thus, Process rnonitoring is inevitably necessary for a better understanding of what is really happening in the micro world. Process visualisation is very important in MEMS but does not guarantee an operative micro system. Therefore, Instruments for quality control are required to secure a safe and reproducible assembly. The hybrid assembly of micro Systems makes great demands on the quality control and process observation. Different components and materials and the various dimensions of the assernbled parts, require a flexible inspection System which is equipped with different sensors to cover the whole range of measurement tasks. Therefore the idea Of a modular in-line observation System (MILOS) is presented.