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Deposition of parylene C and characterization of its hermeticity for the encapsulation of MEMS and medical devices

: Selbmann, F.; Baum, M.; Wiemer, M.; Gessner, T.

DOI: 10.1109/NEMS.2016.7758283

	Institute of Electrical and Electronics Engineers -IEEE-: IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016 : Matsushima Bay and Sendai MEMS City, Japan, 17-20 April, 2016 Piscataway, NJ: IEEE, 2016 ISBN: 978-1-5090-1948-9 (Print) ISBN: 978-1-5090-1947-2 ISBN: 978-1-5090-1946-5 S.427-432
	International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) <11, 2016, Matsushima Bay, Sendai>

	Englisch
	Konferenzbeitrag
	Fraunhofer ENAS ()

Abstract
Following the recent trend of miniaturization of MEMS and the approach to improve the comfort of medical implants for patients by reducing their size the polymer Parylene is a promising candidate for encapsulation issues. Parylene combines a number of excellent properties like biocompatibility/biostability, chemical inertness, transparency and low water permeability. Within the presented work the deposition characteristics and properties like conformity, permeability of water vapor, etc. are examined.

: http://publica.fraunhofer.de/dokumente/N-426632.html