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Back-end-of-line integration technology of capacitive micromachined ultrasonic transducers (CMUT)

: Amelung, Jörg; Klemm, Markus; Elsäßer, Linus; Kircher, Marco; Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas; Müller, Michael; Grüger, Heinrich

Geßner, T. ; MESAGO Messe Frankfurt GmbH, Stuttgart:
Smart Systems Integration 2016. Proceedings : International Conference and Exhibition on Integration Issues of Miniaturized Systems; Munich, Germany, 9-10 March 2016, USB-Stick
Auerbach: Verlag Wissenschaftliche Scripten, 2016
ISBN: 978-3-95735-040-4
ISBN: 3-95735-040-9
International Conference and Exhibition on Integration Issues of Miniaturized Systems <10, 2016, Munich>
Fraunhofer IPMS ()

Capacitive micromachined ultrasonic transducers (CMUT) are a quite new class of ultrasonic transducers which offer advantages over traditional piezo-technologies especially by the realization of transducer arrays. Such integrated systems are well suited for high resolution imaging in medical and NDT applications. One main advantage of the CMUT technology is the ability of integrating sensors with electrical driving and readout circuits using CMOS technology. The CMUT technology developed at Fraunhofer IPMS allows the reliable fabrication of such devices which could be fabricated on top of a CMOS process. This Back-End-of-Line (BEoL) CMOS integration possibility allows usage of state-of-art CMOS processes which reduces parasitic effects, the cost for the process setup and enables easy volume scale-up. The device conception covers also driving and readout circuitry which could be integrated below the CMUT device.