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Minimizing stitching errors for large area laser surface processing

: Ortega Delgado, Moises Alberto; Franke, Volker; Klotzbach, Udo; Lasagni, Andrés-Fabián

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Journal of Laser Micro/Nanoengineering. Online journal 11 (2016), Nr.2, S.185-191
ISSN: 1880-0688
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IWS ()
laser micromachining; laser ablation; laser direct writing; stitching

Direct laser writing is a well-known method for fabricating features in the micrometer scale on a large variety of materials. Several efforts for increasing the working field of a common direct-writing system have been made in the past. Basically, an improvement of the precision of used devices and the implementation of correction algorithms lead to achieve an acceptable accuracy over the complete working field. However, stitching strategies are needed to increase the working area as well as the precision. In this work, a procedure to facilitate the reduction of stitching deviations of a common direct-writing device for large areas has been developed. Using a novel vision system, deviations of the structures inside the working field are measured. Subsequently, different algorithms are used for reducing these stitching deviations. Preliminary results for a conventional laser micromachining device are presented here. Deviations were reduced between ~30% and ~80%.