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Micro scanning mirrors and enabling technology for applied optics

: Sandner, Thilo


Optical Society of America -OSA-, Washington/D.C.:
Imaging and Applied Optics 2016 : Meeting Congress, 25-28 July 2016, Heidelberg, Germany
Washington, DC: OSA, 2016 (OSA Technical digest series)
ISBN: 978-1-943580-15-6
Paper AIT4B.1
Imaging and Applied Optics Congress <2016, Heidelberg>
Meeting "Applied Industrial Optics - Spectroscopy, Imaging and Metrology" <2016, Heidelberg>
Fraunhofer IPMS ()

Micro scanning mirrors play an important role in various optical applications for highly miniaturized, reliable and cost efficient scanning systems like compact laser projection displays, endoscopic and medical imaging systems or LIDAR 3D-cameras. We give an overview about different MEMS scanner technologies including bi-resonant, linear raster scanning and 2D-vectorial scanning systems. Finally we present examples of industrial applications including miniaturized FTIR-spectrometers, tunable laser sources, high power scanner for laser surgery and fast raster scanning devices for medical imaging.