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Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: A review

: Ebermann, M.; Neumann, N.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S.


Piyawattanametha, Wibool (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and Miniaturized Systems XV : 15-17 February 2016, San Francisco, California, USA
Bellingham, WA: SPIE, 2016 (Proceedings of SPIE 9760)
ISBN: 9781628419955
Paper 97600H
Conference "MOEMS and Miniaturized Systems" <15, 2016, San Francisco/Calif.>
Fraunhofer ENAS ()

Many application fields of infrared spectroscopy require small, robust and transportable spectrometers, which are considerable less costly than existing products. Therefore microspectrometer technologies are rapidly emerging and many research groups spend effort on this. Compared to other kinds of devices, micromachined tunable Fabry-Pérot filters are best suited in terms of miniaturization and optical throughput. This paper gives a review of μFP filters for infrared spectroscopy. Different approaches from several groups are compared. Optical performance parameters like wavelength tuning range, spectral resolution and aperture size as well as complexity of fabrication and costs are discussed.