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Design of an integrated piezoelectric micro-flapper based on bionic principles

: Behlert, R.; Schrag, G.; Wachutka, G.; Wieland, R.; Kutter, C.


Institute of Electrical and Electronics Engineers -IEEE-:
DTIP 2016, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS : Budapest, Hungary, May 30th - June, 2, 2016
Piscataway, NJ: IEEE, 2016
ISBN: 978-1-5090-1391-3 (Print)
ISBN: 978-1-5090-1457-6 (Online)
ISBN: 978-1-5090-1458-3 (USB)
4 S.
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) <2016, Budapest>
Fraunhofer EMFT ()

We present a novel micromachined piezoelectric actuator structure, which effects directed large area fluid transport on chip-level and is supposed to be used for venting or cooling applications. The design of the actuator is inspired by the bionic principle of fish locomotion and the flight characteristics of small insects. An intricate superposition of translatory and rotatory motion of a fin-or wing-like structure leads to an undulatory motion of the mechanical structure. This, in turn, induces vortices in the surrounding fluid, which overlap and eventually form a chain of vortices (so-called wake) that generates a strong axial jet stream pointing away from the vibrating flap. The momentum transfer effected thereby on the fluid results in directed flow of mass and convective heat.