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Temporally-stable active precision mount for large optics

: Reinlein, C.; Damm, C.; Lange, N.; Kamm, A.; Mohaupt, M.; Brady, A.; Goy, M.; Leonhard, N.; Eberhardt, R.; Zeitner, U.D.; Tünnermann, A.

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Optics Express 24 (2016), Nr.12, S.13527-13541
ISSN: 1094-4087
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IOF ()

We present a temporally-stable active mount to compensate for manufacturing-induced deformations of reflective optical components. In this paper, we introduce the design of the active mount, and its evaluation results for two sample mirrors: a quarter mirror of 115 × 105 × 9 mm3, and a full mirror of 228 × 210 × 9 mm3. The quarter mirror with 20 actuators shows a best wavefront error rms of 10 nm. Its installation position depending deformations are addressed by long-time measurements over 14 weeks indicating no significance of the orientation. Size-induced differences of the mount are studied by a full mirror with 80 manual actuators arranged in the same actuator pattern as the quarter mirror. This sample shows a wavefront error rms of (27±2) nm over a measurement period of 46 days. We conclude that the developed mount is suitable to compensate for manufacturing-induced deformations of large reflective optics, and likely to be included in the overall systems alignment procedure.