Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Catalytic ALD of SiO2 as spacer for an E-Beam direct write self-aligned double patterning process on 300 mm wafers

Presentation held at 16th International Conference on Atomic Layer Deposition 2016, July 24th - 27th, 2016, Dublin, Ireland
 
: Kühnel, Kati; Riedel, Stefan; Weinreich, Wenke; Thrun, Xaver; Czernohorsky, Malte; Pätzold, Björn; Rudolph, Matthias

2016, 20 Folien
International Conference on Atomic Layer Deposition <16, 2016, Dublin>
Englisch
Vortrag
Fraunhofer IPMS ()
Anfrage beim Institut / Available on request from the institute bibliothek@ipms.fraunhofer.de

: http://publica.fraunhofer.de/dokumente/N-421244.html