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Nano particle production by laser ablation and metal sputtering on Si-wafer substrate

: Azhdast, M.H.; Azdasht, G.; Lüdeke, H.; Lang, K.-D.; Glaw, V.

DOI: 10.1364/ASSL.2015.AM5A.3

	Optical Society of America -OSA-, Washington/D.C.: Advanced Solid State Lasers 2015 : Berlin, Germany, October 4-9, 2015 Washington, DC: OSA, 2015 ISBN: 978-1-943580-02-6 Paper AM5A.3
	Conference "Advanced Solid State Lasers" (ASSL) <2015, Berlin>

	Englisch
	Konferenzbeitrag
	Fraunhofer IZM ()

Abstract
This research relates to methods of deposition and patterning a surface with nano sputtered particles by Laser. The method is mask-less and without vacuum requirement which can be used in wire bonding and microelectronics devices.

: http://publica.fraunhofer.de/dokumente/N-418010.html