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Miniaturized NIR scanning grating spectrometer for use in mobile phones

: Knobbe, Jens; Pügner, Tino; Grüger, Heinrich


Druy, Mark A. (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Next-Generation Spectroscopic Technologies IX : 18-19 April 2016, Baltimore, Maryland, United States
Bellingham, WA: SPIE, 2016 (Proceedings of SPIE 9855)
ISBN: 978-1-5106-0096-6
Paper 985502, 11 S.
Conference "Next-Generation Spectroscopic Technologies" <9, 2016, Baltimore/Md.>
Fraunhofer IPMS ()

An extremely miniaturized scanning grating spectrometer at the size of a sugar cube has been developed at Fraunhofer IPMS. To meet the requirements for the integration into a mobile phone a new system approach has been pursued. The key component within the system is a silicon-based deflectable diffraction grating with an integrated driving mechanism. A first sample of the new spectrometer was built and characterized. It was found to have a spectral range from 950 nm to 1900 nm at a resolution of 10 nm. The results show that the performance of the new MEMS spectrometer is in good agreement with the requirements for mobile phone integration.