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Consideration of inhomogeneous shrinkages for LTCC-applications in panel-level processes

: Lenz, Christian; Kappert, Sandro; Ziesche, Steffen; Neubert, Holger; Partsch, Uwe


Institute of Electrical and Electronics Engineers -IEEE-:
39th International Spring Seminar on Electronics Technology, ISSE 2016 : Printed electronics and smart textiles, 18-22 May 2016, Pilsen, Czech Republic
Piscataway, NJ: IEEE, 2016
ISBN: 978-1-5090-1389-0 (Online)
ISBN: 978-1-5090-1390-6 (Print)
International Spring Seminar on Electronics Technology (ISSE) <39, 2016, Pilsen>
Fraunhofer IKTS ()
LTCC; microsystems; shrinkage field; production yield; free sintering

The aim of our study is a knowledge-based consideration of the inhomogeneous lateral shrinkage (shrinkage field) of commercial Low temperature co-fired ceramic (LTCC-) materials under free sintering conditions to improve the geometrical design fidelity and productions yield of system packages and microsystems fabricated in LTCC. Thus the phenomenological investigations of LTCC materials under various lamination and sintering conditions are presented. Deduced from this, feasible approaches for the compensation of the inhomogeneous shrinkages are introduced. Further thermal as well as thermomechanical analysis distinguish the origin of the shrinkage fields and enable the knowledge-based control of the shrinkage behavior in the design and fabrication process as well as in the material development.