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Growth of Ga₂O₃ by furnace oxidation of GaN studied by perturbed angular correlations

: Steffens, Michael; Vianden, Reiner; Pasquevich, Alberto F.

Volltext ()

Hyperfine interactions 237 (2016), Nr.1, Art. 117
ISSN: 0304-3843
ISSN: 1572-9540
International Conference on Hyperfine Interactions and their Applications (HYPERFINE) <2016, Leuven>
Zeitschriftenaufsatz, Konferenzbeitrag, Elektronische Publikation
Fraunhofer INT ()
perturbed angular correlation spectroscopy; TDPAC; gallium nitride; gallium oxide; self-trapped hole; furnace oxidation

Ga₂O₃ is a promising material for use in “solar-blind” UV-detectors which can be produced efficiently by oxidation of GaN. In this study we focus on the evolution of the oxide layer when GaN is heated in air. The experimental method applied is the perturbed angular correlation (PAC) spectroscopy of γ-rays emitted by radioactive nuclides, here 111Cd and 181Ta, whose parent nuclei are ion implanted into films of GaN grown on sapphire. As the emission pattern for nuclei in GaN is clearly distinct from that of nuclei in Ga₂O₃, the fraction of probe nuclei in the oxide layer can be directly measured and allows to follow the time dependent growth of the oxide on a scale of less than 100 nm. Additional measurements were carried out with the oxidized sample held at fixed temperatures in the temperature range from 19 K to 973 K showing transitions between the hyperfine interactions of 111Cd in the oxide matrix both at high and low temperatures. A model for these transitions is proposed.