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2007
Master Thesis
Titel
Optimization of a nanomeasuring machine
Abstract
This thesis considers measurement uncertainties for different influences as material light intensity gradient influence surface roughness tamperature speed influence as well as direction dependence. Also optimized control parameters are proposed and basic investigations regarding modelling are presented. First ultra precision is introduced and the corresponding measuring devices are presented. Thereafter sate of the art ultra precision coordinate measuring machines are introduced followed by a detailed NMM-1 description on shich the thesis is based. Then uncertainly measurements and control optimization are presented and conclusion drawn.
ThesisNote
Aachen, TH, Master Thesis, 2007
Verlagsort
Aachen