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Wide-field broadband extreme ultraviolet transmission ptychography using a high-harmonic source

: Baksh, P.D.; Odstrcil, M.; Kim, H.-S.; Boden, S.A.; Frey, J.G.; Brocklesby, W.S.

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Optics Letters 41 (2016), Nr.7, S.1317-1320
ISSN: 0146-9592
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer ILT ()

High-harmonic generation (HHG) provides a laboratory-scale source of coherent radiation ideally suited to lensless coherent diffractive imaging (CDI) in the EUV and x-ray spectral region. Here we demonstrate transmission extreme ultraviolet (EUV) ptychography, a scanning variant of CDI, using radiation at a wavelength around 29 nm from an HHG source. Image resolution is diffraction-limited at 54 nm and fields of view up to ∼100  μm are demonstrated. These results demonstrate the potential for wide-field, high-resolution, laboratory-scale EUV imaging using HHG-based sources with potential application in biological imaging or EUV lithography pellicle inspection.