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Temperature control of an SThM micro-probe with an heat source estimator and a lock-in measurement

 
: Lenczner, Michel; Yang, Bin; Cogan, Scott D.; Domas, Stêphane; Ke, D.; Couturier, Raphaël; Renault, D.; Köhler, Bernd; Janus, Pawel

:
Postprint urn:nbn:de:0011-n-3998826 (1.2 MByte PDF)
MD5 Fingerprint: d28fcd46248e518849b42f4dbb3b729b
Erstellt am: 29.4.2017


Institute of Electrical and Electronics Engineers -IEEE-:
17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016 : Montpellier, 18-20 April 2016
Piscataway, NJ: IEEE, 2016
ISBN: 978-1-5090-2106-2
8 S.
International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) <17, 2016, Montpellier>
Englisch
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IKTS ()
control with delay in observation; lock-in amplifier; model parameter calibration; multiscale model; scanning thermal microscopy; source estimation; temperature control

Abstract
In view of qualitative temperature measurement by scanning thermal microscopy, we introduce a model-based control law for a new microfabricated probe. The underlying model is the time-space two-scale electro-thermal model presented in [15], since it has the power to represent transcients of harmonic modulations. The control method accounts for an estimation of the heat source in the sample and for the delay in the lock-in filter based observation. Experiment-based model calibration is a prerequisite and is discussed in detail.

: http://publica.fraunhofer.de/dokumente/N-399882.html