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Single exposure imaging of talbot carpets and resolution characterization of detectors for micro- and nano-patterns

 
: Kim, H.; Danylyuk, S.; Brocklesby, W.S.; Juschkin, L.

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Journal of the Optical Society of Korea : JOSK 20 (2016), Nr.2, S.245-250
ISSN: 1226-4776 (Print)
ISSN: 2093-6885 (Online)
Englisch
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer ILT ()

Abstract
In this paper, we demonstrate a self-imaging technique that can visualize longitudinal interference patterns behind periodically-structured objects, which is often referred to as Talbot carpet. Talbot carpet is of great interest due to ever-decreasing scale of interference features. We demonstrate experimentally that Talbot carpets can be imaged in a single exposure configuration revealing a broad spectrum of multi-scale features. We have performed rigorous diffraction simulations for showing that Talbot carpet print can produce ever-decreasing structures down to limits set by mask feature sizes. This demonstrates that large-scale pattern masks may be used for direct printing of features with substantially smaller scales. This approach is also useful for characterization of image sensors and recording media.

: http://publica.fraunhofer.de/dokumente/N-397732.html